Thickness variation compensation in a Fabry–Perot modulator array using a self-tuned Fabry–Perot structure
نویسندگان
چکیده
A method is presented for compensating cavity thickness variations in conventional Fabry–Perot devices through the replacement of the input mirror with a holographic mirror, resulting in a self-tuned Fabry–Perot ~STFP! device. The technique is suitable for integrating large arrays of electro-optic Fabry–Perot modulators with silicon circuitry. Experimental results of a STFP modulator are presented showing cavity thickness compensation of an electrooptic 9/65/35 bulk lead lanthanum zirconate titanate crystal having thickness variations corresponding to ;6 Fabry–Perot fringes in a 2.532.5 mm area. The compensated modulator used an in situ recorded Fe-doped LiNbO3 holographic mirror, and had a uniform backreflection over a 2.532.5 mm 2 area. © 1997 American Institute of Physics. @S0003-6951~97!03410-4#
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